Shutdown AG4100 SNF 2008-08-26 17:06:10: Wafer Handling
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Aug 29 11:19:02 PDT 2008
Adjusted the robot height. Checked wafer hand-off to all 25 slots of the cassette.
More information about the AG4100-pcs
mailing list