Shutdown AG4100 SNF 2008-11-14 15:04:18: Chamber Repair

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Dec 3 16:13:05 PST 2008


Performed pyrometer calibration, ran 15 wafers using the Qual 1150 recipe with no problems.  Adjusted the door locking mechanism , now door leak is gone.  Ran Ti test wafers and did not see any discoloration.
 




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