Problem AG4100 SNF 2008-12-03 16:19:39: Needs to run a process qual

shott at snf.stanford.edu shott at snf.stanford.edu
Thu Dec 4 11:40:02 PST 2008


I've run the process qual and seem to get a mean thickness that is close to that expected on the AG4108.  I don't know about on-wafer uniformity .... but overall, this looks pretty good to my untrained eye.
See the following Qualification Comment for details ...
John




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