From eenriquez at snf.stanford.edu Wed Feb 6 16:02:52 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Feb 2008 16:02:52 -0800 Subject: Shutdown AG4100 SNF 2008-02-06 16:02:51: Chamber needs to be cleaned Message-ID: From tberg at snf.stanford.edu Fri Feb 8 07:18:38 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 Feb 2008 07:18:38 -0800 Subject: Comment AG4100 SNF 2008-02-08 07:18:38: N2O MFC resized and installed Message-ID: N2O Mfc is resized to 5SLM and installed From tberg at snf.stanford.edu Fri Feb 8 07:20:22 2008 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 Feb 2008 07:20:22 -0800 Subject: Comment AG4100 SNF 2008-01-30 13:55:47: N2O MFC out for Range Change Message-ID: completed From eenriquez at snf.stanford.edu Tue Feb 12 11:07:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Feb 2008 11:07:49 -0800 Subject: Shutdown AG4100 SNF 2008-02-06 16:02:51: Chamber needs to be cleaned Message-ID: Installed clean chamber and ran pyrometer calibration. Need to run a process qualification. From eenriquez at snf.stanford.edu Tue Feb 12 11:08:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Feb 2008 11:08:05 -0800 Subject: Comment AG4100 SNF 2008-02-08 07:18:38: N2O MFC resized and installed Message-ID: Noted From eenriquez at snf.stanford.edu Tue Feb 12 11:08:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Feb 2008 11:08:30 -0800 Subject: Comment AG4100 SNF 2008-02-12 11:08:29: Need process qulification Message-ID: From jhpark9 at snf.stanford.edu Thu Feb 14 15:19:49 2008 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Thu, 14 Feb 2008 15:19:49 -0800 Subject: Problem AG4100 SNF 2008-02-14 15:19:49: overshoot problem Message-ID: I ran 600ON, but there were overshoot problems which I didn't meet before. Please check this. From jrjain at snf.stanford.edu Thu Feb 14 23:03:41 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 14 Feb 2008 23:03:41 -0800 Subject: Problem AG4100 SNF 2008-02-14 23:03:40: Lamp Failure Message-ID: After ~2min of a 3min 950C oxidation test, pyrometer temperature falls sharply, causing a "temperature out of limit at steay" fault. This happened thrice in a row (on different wafers) after 4 successful runs. From eenriquez at snf.stanford.edu Fri Feb 15 09:02:20 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Feb 2008 09:02:20 -0800 Subject: Comment AG4100 SNF 2008-02-15 09:02:19: Update Message-ID: Wating for clean wafers so that I can run a test. From jrjain at snf.stanford.edu Fri Feb 15 15:23:11 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 15 Feb 2008 15:23:11 -0800 Subject: Problem AG4100 SNF 2008-02-15 15:23:06: Temperature Problem Update Message-ID: Repeated last night's oxidations on a test wafer to diagnose further. Just before the temperature reading starts to drop in the middle of an oxidation, all of the lamps appear to turn off (could see no light around chamber door). Intensity shoots up to try to increase lamp output, but lamps fail to turn back on and system ultimately faults. Based on this, the problem doesn't appear to be an erroneous reading but rather more directly related to the lamps themselves (or the scrs as Ed suggested). From rissman at snf.stanford.edu Tue Feb 19 09:14:29 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Tue, 19 Feb 2008 09:14:29 -0800 Subject: Problem AG4100 SNF 2008-02-14 15:19:49: overshoot problem Message-ID: Ed checked and this appears to be a recipe problem. From eenriquez at snf.stanford.edu Wed Feb 27 16:15:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Feb 2008 16:15:21 -0800 Subject: Comment AG4100 SNF 2008-02-15 09:02:19: Update Message-ID: Users ran test. From eenriquez at snf.stanford.edu Wed Feb 27 16:19:05 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 27 Feb 2008 16:19:05 -0800 Subject: Comment AG4100 SNF 2008-02-27 16:19:05: Update Message-ID: Cooling water flow is too low. Should be 2 - 2.5 gpm. It is flowing around 1 gpm. Need to check if we have sufficient water flow to the system or if the chamber cooling channels have a restriction.