Problem AG4100 SNF 2008-02-14 23:03:40: Lamp Failure

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Feb 14 23:03:41 PST 2008


After ~2min of a 3min 950C oxidation test, pyrometer temperature falls sharply, causing a "temperature out of limit at steay" fault.  This happened thrice in a row (on different wafers) after 4 successful runs.




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