Problem AG4100 SNF 2008-02-15 15:23:06: Temperature Problem Update

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri Feb 15 15:23:11 PST 2008


Repeated last night's oxidations on a test wafer to diagnose further.  Just before the temperature reading starts to drop in the middle of an oxidation, all of the lamps appear to turn off (could see no light around chamber door).  Intensity shoots up to try to increase lamp output, but lamps fail to turn back on and system ultimately faults.  Based on this, the problem doesn't appear to be an erroneous reading but rather more directly related to the lamps themselves (or the scrs as Ed suggested).




More information about the AG4100-pcs mailing list