Problem AG4100 SNF 2008-01-11 15:15:19: NH3 gas does not turn on

vincentcyw at vincentcyw at
Fri Jan 11 15:15:19 PST 2008

Was going to do a RTN on Si, but the NH3 gas never turned on. NH3 was supposed to flow at 1sccm according to the recipe.

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