Problem AG4100 SNF 2008-01-17 23:59:13: Oxygen not flowing again

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Thu Jan 17 23:59:14 PST 2008


I run the recipes: 600ON and RTO_600.
I saw no oxygen flowing, again.
Vincentcyw also reported NH3 problem, in the comment above.




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