Problem AG4100 SNF 2008-01-11 15:15:19: NH3 gas does not turn on

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jan 24 09:24:15 PST 2008


Pneumatic valves were unable to open because the CDA pressure had been turned down.  Increased pressure to 80 psi. Now able to flow most of the gases.  Still unable to flow the forming gas (H2/N2).  Also, the maximum flow for N2O is only 150 sccm.. need to resize the MFC.




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