From masaharu at snf.stanford.edu Wed Jul 9 11:17:01 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Wed, 9 Jul 2008 11:17:01 -0700 Subject: Comment AG4100 SNF 2008-07-09 11:17:01: Ammonia flowing, looks okay Message-ID: I am not sure if any update was done, but Ammonia is flowing well with 600ON, thermal nitridation recipe. From jackson at snf.stanford.edu Mon Jul 14 18:43:36 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Mon, 14 Jul 2008 18:43:36 -0700 Subject: Shutdown AG4100 SNF 2008-07-14 18:43:36: plate over temp error Message-ID: Error's after 2 wfrs and Ed could't reset From emyers at snf.stanford.edu Mon Jul 14 19:20:15 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Jul 2008 19:20:15 -0700 Subject: Shutdown AG4100 SNF 2008-07-14 18:43:36: plate over temp error Message-ID: Found the cooling water chiller had not been restarted. Turned it on and we are running another test. From mhilali at snf.stanford.edu Tue Jul 15 19:44:03 2008 From: mhilali at snf.stanford.edu (mhilali at snf.stanford.edu) Date: Tue, 15 Jul 2008 19:44:03 -0700 Subject: Comment AG4100 SNF 2008-07-15 19:44:02: RTA4100 alarm Message-ID: RTA4100 gives a low air and low cooling water alarm even though cooling water appears to be running. Wafer in furnace. Robot arm does not move to unload wafer From mhilali at snf.stanford.edu Tue Jul 15 20:26:53 2008 From: mhilali at snf.stanford.edu (mhilali at snf.stanford.edu) Date: Tue, 15 Jul 2008 20:26:53 -0700 Subject: Comment AG4100 SNF 2008-07-15 20:26:53: RTA AG4100 Message-ID: robort arm is moving after robot home initialization. Unloaded wafer fine. However, still giving low air, low cooling water alarm. From masaharu at snf.stanford.edu Sat Jul 19 01:48:21 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 19 Jul 2008 01:48:21 -0700 Subject: Problem AG4100 SNF 2008-07-19 01:48:21: errors and cannot run Message-ID: 1. Air N2 cooling low 2. Cooling water low although I could run in the daytime. From eenriquez at snf.stanford.edu Mon Jul 21 11:41:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jul 2008 11:41:13 -0700 Subject: Shutdown AG4100 SNF 2008-07-21 11:41:13: CDA flow is too low Message-ID: From jrjain at snf.stanford.edu Tue Jul 22 11:47:58 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Tue, 22 Jul 2008 11:47:58 -0700 Subject: Problem AG4100 SNF 2008-07-22 11:47:57: Estimated Repair Time? Message-ID: What is the estimated repair time for this tool? From eenriquez at snf.stanford.edu Thu Jul 24 14:41:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jul 2008 14:41:41 -0700 Subject: Shutdown AG4100 SNF 2008-07-21 11:41:13: CDA flow is too low Message-ID: Mike adjusted the CDA regulator pressure limit. Now CDA is at 100 psi was at 82 psi. From eenriquez at snf.stanford.edu Thu Jul 24 14:41:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jul 2008 14:41:51 -0700 Subject: Problem AG4100 SNF 2008-07-22 11:47:57: Estimated Repair Time? Message-ID: Mike adjusted the CDA regulator pressure limit. Now CDA is at 100 psi was at 82 psi. From jrjain at snf.stanford.edu Thu Jul 24 22:34:35 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 24 Jul 2008 22:34:35 -0700 Subject: Problem AG4100 SNF 2008-07-24 22:34:34: Chamber Door Problem Message-ID: At beginning and end of an auto 5-wafer qual run, received error message: "Chamber problem door to be closed" At the beginning, this error appeared after the initial chamber preheat but before the first wafer was put into the system. At the end, the same error appeared after removing the last wafer from the chamber and putting it on the cooling station. From jrjain at snf.stanford.edu Thu Jul 24 22:59:31 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 24 Jul 2008 22:59:31 -0700 Subject: Comment AG4100 SNF 2008-07-24 22:59:30: Process Qual Data (07/24/2008) Message-ID: Recipe: QUAL1150 Wafer # Avg. (A) Std. Dev (A) 1 72.2 0.9 2 73.5 1.2 3 69.2 1.1 4 70.4 1.9 5 71.5 2.5 From jrjain at snf.stanford.edu Thu Jul 24 23:00:11 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 24 Jul 2008 23:00:11 -0700 Subject: Shutdown AG4100 SNF 2008-07-24 23:00:11: Failed Qual (and door problem) Message-ID: Qual oxide thickness was nearly half expected value. From mtang at snf.stanford.edu Fri Jul 25 14:40:18 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:40:18 -0700 Subject: Shutdown AG4100 SNF 2008-07-24 23:00:11: Failed Qual (and door problem) Message-ID: I'm taking this out of shutdown at the request of the superuserswho would like to try some experiments. Please be aware that the process qual has failed -- although the system is functional, its effective temperature is probably much lower than it should be. From mtang at snf.stanford.edu Fri Jul 25 14:40:39 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:40:39 -0700 Subject: Problem AG4100 SNF 2008-07-25 14:40:39: See previous shutdown notice, 7/24. Message-ID: From jrjain at snf.stanford.edu Fri Jul 25 15:21:13 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 25 Jul 2008 15:21:13 -0700 Subject: Problem AG4100 SNF 2008-07-25 15:21:12: Temperature Off Message-ID: skoh did TSUPREM simulations to determine the difference in reported vs. actual chamber temperature for the qual. Qual thickness is supposed to be ~120A. Last measured results (yesterday) were ~70A. According to simulation, this corresponds to a temperature difference of ~75deg. Moreover, these temperature differences are not repeatable from qual to qual (see previous qual results). The system needs to be brought back to spec. Superusers and Mary decided to put system back online for those who can work around this while the issue is addressed. From jackson at snf.stanford.edu Thu Jul 31 00:33:58 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 31 Jul 2008 00:33:58 -0700 Subject: Problem AG4100 SNF 2008-07-31 00:33:57: overtemp alarms Message-ID: running 1050 for 120 seconds ...had to put in a five minute delay between wfrs so the overtemp would not alarm...worse when trying to run both RTA's... From jackson at snf.stanford.edu Thu Jul 31 00:37:30 2008 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 31 Jul 2008 00:37:30 -0700 Subject: Comment AG4100 SNF 2008-07-31 00:37:30: overtemp alarm Message-ID: trying to run 1050 for 120 seconds....had to put in a delay of five minutes between wafers so it wouldn't overtemp.....worse when tried to run both RTA's