Comment AG4100 SNF 2008-07-09 11:17:01: Ammonia flowing, looks okay

masaharu at snf.stanford.edu masaharu at snf.stanford.edu
Wed Jul 9 11:17:01 PDT 2008

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I am not sure if any update was done,
but Ammonia is flowing well with 600ON, thermal
nitridation recipe.

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