Comment AG4100 SNF 2008-07-15 19:44:02: RTA4100 alarm

mhilali at snf.stanford.edu mhilali at snf.stanford.edu
Tue Jul 15 19:44:03 PDT 2008


RTA4100 gives a low air and low cooling water alarm even though cooling water appears to be running. Wafer in furnace. Robot arm does not move to unload wafer




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