Comment AG4100 SNF 2008-07-15 20:26:53: RTA AG4100

mhilali at snf.stanford.edu mhilali at snf.stanford.edu
Tue Jul 15 20:26:53 PDT 2008


robort arm is moving after robot home initialization. Unloaded wafer fine. However, still giving low air, low cooling water alarm.




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