Problem AG4100 SNF 2008-07-24 22:34:34: Chamber Door Problem

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Jul 24 22:34:35 PDT 2008


At beginning and end of an auto 5-wafer qual run, received error message:
"Chamber problem door to be closed"
At the beginning, this error appeared after the initial chamber preheat but before the first wafer was put into the system.
At the end, the same error appeared after removing the last wafer from the chamber and putting it on the cooling station.




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