Problem AG4100 SNF 2008-07-25 15:21:12: Temperature Off

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri Jul 25 15:21:13 PDT 2008


skoh did TSUPREM simulations to determine the difference in reported vs. actual chamber temperature for the qual.
Qual thickness is supposed to be ~120A.  Last measured results (yesterday) were ~70A.  According to simulation, this corresponds to a temperature difference of ~75deg.
Moreover, these temperature differences are not repeatable from qual to qual (see previous qual results).  The system needs to be brought back to spec.  Superusers and Mary decided to put system back online for those who can work around this while the issue is addressed.




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