Comment AG4100 SNF 2008-07-31 00:37:30: overtemp alarm

jackson at snf.stanford.edu jackson at snf.stanford.edu
Thu Jul 31 00:37:30 PDT 2008


trying to run 1050 for 120 seconds....had to put in a delay of 
five minutes between wafers so it wouldn't overtemp.....worse when tried to run both RTA's




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