From duygu at snf.stanford.edu Fri Jun 6 01:26:15 2008 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Fri, 6 Jun 2008 01:26:15 -0700 Subject: Problem AG4100 SNF 2008-06-06 01:26:14: qualification test Message-ID: I ran qualification test.It failed in the last three seconds.Thickness is 67.4A for ~27 seconds oxidation at 1150C. From duygu at snf.stanford.edu Fri Jun 6 03:46:05 2008 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Fri, 6 Jun 2008 03:46:05 -0700 Subject: Problem AG4100 SNF 2008-06-06 03:46:04: more qualification tests Message-ID: I ran at 950, 1050, 1150 950C:25.6A 1050C:38.5A 1150C:69.3A(failed in last 3 secons due to overheating) Old data that I got from Jim Mcvittie shows 950C:40A 1050C:73A 1150:121A From duygu at snf.stanford.edu Fri Jun 6 04:50:07 2008 From: duygu at snf.stanford.edu (duygu at snf.stanford.edu) Date: Fri, 6 Jun 2008 04:50:07 -0700 Subject: Comment AG4100 SNF 2008-06-06 04:50:05: try Message-ID: From eenriquez at snf.stanford.edu Fri Jun 6 14:56:55 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Jun 2008 14:56:55 -0700 Subject: Comment AG4100 SNF 2008-06-06 14:56:54: Completed pyrometer cal Message-ID: Duygu will be running the qualification test. From emyers at snf.stanford.edu Mon Jun 9 16:21:25 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 9 Jun 2008 16:21:25 -0700 Subject: Problem AG4100 SNF 2008-06-09 16:21:25: Low Ammonia Gas Message-ID: I was watching a nitridation process this afternoon. The Ammonia flow steadily decreased during the process as did the delivery pressure for the gas. I checked the gas bottle in the gas bunker with mixed results. I have informed the maintenance staff with the hope of a quick resolution. In the mean time, you may not have ammonia during your process. From emyers at snf.stanford.edu Tue Jun 10 11:16:58 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 10 Jun 2008 11:16:58 -0700 Subject: Shutdown AG4100 SNF 2008-06-10 11:16:57: Failed Qual Message-ID: Average Thickness droped down to mid-60 Ang level, about half of the target 110 to 115 Ang. Calibration is in question. From eenriquez at snf.stanford.edu Tue Jun 10 14:56:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 Jun 2008 14:56:57 -0700 Subject: Comment AG4100 SNF 2008-06-10 14:56:57: Update Message-ID: TC temperature and pyrometer temperature at 550 C and 900 C is within 10 degrees of each other. Will check the TC calibration tomorrow. From eenriquez at snf.stanford.edu Wed Jun 11 09:37:56 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Jun 2008 09:37:56 -0700 Subject: Comment AG4100 SNF 2008-06-11 09:37:56: Completed TC + pyrometer cal Message-ID: Need to check process qual From eenriquez at snf.stanford.edu Fri Jun 13 12:09:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 13 Jun 2008 12:09:45 -0700 Subject: Comment AG4100 SNF 2008-06-13 12:09:45: Needs new pyrometer Message-ID: Field service determined that the pyrometer was too low. The output at 1000 C had dropped to ~200 mV from `~ 400 mV . In comparison, the pyrometer output of the 4108 is ~ 800 mV. Will order a new pyrometer. Now waiting for a quote. From shott at snf.stanford.edu Tue Jun 17 12:33:32 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 17 Jun 2008 12:33:32 -0700 Subject: Shutdown AG4100 SNF 2008-06-10 11:16:57: Failed Qual Message-ID: AllWin has replaced the pyrometer head with a new unit and they calibration has been run. This new head is giving us a significantly stronger output. Please proceed cautiously with test wafers on your recipe until a full process qualification run can be completed. Thanks, Ed, Mike, and John From shott at snf.stanford.edu Tue Jun 17 12:33:50 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 17 Jun 2008 12:33:50 -0700 Subject: Comment AG4100 SNF 2008-06-10 14:56:57: Update Message-ID: From shott at snf.stanford.edu Tue Jun 17 12:33:59 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 17 Jun 2008 12:33:59 -0700 Subject: Comment AG4100 SNF 2008-06-11 09:37:56: Completed TC + pyrometer cal Message-ID: From shott at snf.stanford.edu Tue Jun 17 12:34:04 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 17 Jun 2008 12:34:04 -0700 Subject: Comment AG4100 SNF 2008-06-13 12:09:45: Needs new pyrometer Message-ID: From emyers at snf.stanford.edu Tue Jun 17 12:43:09 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 17 Jun 2008 12:43:09 -0700 Subject: Problem AG4100 SNF 2008-06-17 12:43:08: Needs Process Qual Message-ID: New pyrometer was installed and the temperature calibration was completed. Needs Qual 1150 recipe ran to complete qualification. From nvgirish at snf.stanford.edu Wed Jun 18 20:00:48 2008 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Wed, 18 Jun 2008 20:00:48 -0700 Subject: Comment AG4100 SNF 2008-06-18 20:00:47: Process Qual Data 06/18/08 nvgirish Message-ID: Hi all I ran a process qualification run (Qual1150) on AG4100. 5 wafers, Rudolph Ellipsometer data (5 points Calc Routine # 11) Wafer #1 Avg. (Angstrom) Std Dev (Angstrom) 1 90.4 1.9 2 92 2.4 3 92.2 2.6 4 92.7 4.1 5 92.8 3.1 -Girish From emyers at snf.stanford.edu Mon Jun 23 08:10:09 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:10:09 -0700 Subject: Problem AG4100 SNF 2008-05-29 15:12:43: steady state temperature not stable Message-ID: No sure of the problem, but the system has ran sucessfully. The pyrometer was changed, system calibrated and passed qualification. From emyers at snf.stanford.edu Mon Jun 23 08:11:14 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:11:14 -0700 Subject: Comment AG4100 SNF 2008-05-30 14:50:57: Process Qual Data 4/28/09 Message-ID: The pyrometer was failing. It has been replaced and we are back to the normal qualification thickness for the tool. From emyers at snf.stanford.edu Mon Jun 23 08:12:17 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:12:17 -0700 Subject: Problem AG4100 SNF 2008-05-30 18:41:31: Fails after 10 or 15 sec of a 20 sec 1050 anneal Message-ID: This occurs occasionally. We have not been able to resolve the root cause. The pyrometer has been changed and we will monitor the system for this type of failure. From emyers at snf.stanford.edu Mon Jun 23 08:12:45 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:12:45 -0700 Subject: Problem AG4100 SNF 2008-06-06 01:26:14: qualification test Message-ID: The pyrometer was replaced and the system is back to the normal qualification thickness. From emyers at snf.stanford.edu Mon Jun 23 08:13:20 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:13:20 -0700 Subject: Problem AG4100 SNF 2008-06-06 03:46:04: more qualification tests Message-ID: Pyrometer was replace and the system requalified following these results. From emyers at snf.stanford.edu Mon Jun 23 08:13:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:13:31 -0700 Subject: Comment AG4100 SNF 2008-06-06 04:50:05: try Message-ID: From emyers at snf.stanford.edu Mon Jun 23 08:14:43 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jun 2008 08:14:43 -0700 Subject: Problem AG4100 SNF 2008-06-17 12:43:08: Needs Process Qual Message-ID: System qual'd by nvgirish on 6/18/08. The oxide thickness is back to the baseline for the tool.