From riteshj at snf.stanford.edu Sat Mar 1 17:14:33 2008 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Sat, 1 Mar 2008 17:14:33 -0800 Subject: Problem AG4100 SNF 2008-03-01 17:14:32: silicide is brown near the door Message-ID: Door is not closing correctly, i think some oxygen is going in, please fix the door. From eenriquez at snf.stanford.edu Wed Mar 5 18:39:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Mar 2008 18:39:09 -0800 Subject: Comment AG4100 SNF 2008-03-05 18:39:07: Adjusted door Message-ID: Need to recheck for leak From jrjain at snf.stanford.edu Wed Mar 5 21:13:30 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 5 Mar 2008 21:13:30 -0800 Subject: Problem AG4100 SNF 2008-03-05 21:13:29: Chamber coated Message-ID: Can see dark brown coating inside chamber. This will affect temperature uniformity and should be cleaned. From emyers at snf.stanford.edu Thu Mar 6 07:50:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 6 Mar 2008 07:50:31 -0800 Subject: Comment AG4100 SNF 2008-03-06 07:50:30: A First Message-ID: There is very heavy, localized deposites on the bottom of the camber near the pyrometer. I have never seen coatings on the bottom of the chamber (this goes back many years as an RTP engineer in industry. I will be contacting the lab members who used the tool since the chamber clean and try to find out whhat happened. From rissman at snf.stanford.edu Thu Mar 6 09:15:45 2008 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Thu, 6 Mar 2008 09:15:45 -0800 Subject: Shutdown AG4100 SNF 2008-03-06 09:15:45: deposit on chamber Message-ID: from Ed 3/6 There is very heavy, localized deposites on the bottom of the camber near the pyrometer. I have never seen coatings on the bottom of the chamber (this goes back many years as an RTP engineer in industry. I will be contacting the lab members who used the tool since the chamber clean and try to find out whhat happened. From eenriquez at snf.stanford.edu Fri Mar 7 14:03:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Mar 2008 14:03:35 -0800 Subject: Comment AG4100 SNF 2008-03-07 14:03:35: Update Message-ID: Removed the chamber. We will order a new chamber. From eenriquez at snf.stanford.edu Wed Mar 12 17:21:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Mar 2008 17:21:06 -0700 Subject: Comment AG4100 SNF 2008-03-07 14:03:35: Update Message-ID: Installed new chamber and tray. TC wafer broke during pyrometer calibration. Requested an RMA number from the vendor so that I can send the TC wafer out for repair. From eenriquez at snf.stanford.edu Wed Mar 12 17:21:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Mar 2008 17:21:23 -0700 Subject: Comment AG4100 SNF 2008-03-12 17:21:23: Update Message-ID: Installed new chamber and tray. TC wafer broke during pyrometer calibration. Requested an RMA number from the vendor so that I can send the TC wafer out for repair. From eenriquez at snf.stanford.edu Fri Mar 14 14:22:42 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Mar 2008 14:22:42 -0700 Subject: Comment AG4100 SNF 2008-03-14 14:22:41: Update Message-ID: Ordered 2 new tc wafers. From eenriquez at snf.stanford.edu Mon Mar 17 14:21:42 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 14:21:42 -0700 Subject: Comment AG4100 SNF 2008-03-17 14:21:41: Update TC wafer Message-ID: New pyrometer calibration wafers ETA in two weeks.