From emyers at snf.stanford.edu Mon May 5 08:11:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 5 May 2008 08:11:31 -0700 Subject: Comment AG4100 SNF 2008-05-05 08:11:30: Process Qual Completed Message-ID: Wafers have been ran and measured. Results being reviewed by the RTP Quality Group. From mdickey at snf.stanford.edu Thu May 8 07:39:42 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 8 May 2008 07:39:42 -0700 Subject: Shutdown AG4100 SNF 2008-05-08 07:39:41: Water flow Message-ID: Working on water flow isssue From eenriquez at snf.stanford.edu Thu May 8 14:31:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 May 2008 14:31:59 -0700 Subject: Shutdown AG4100 SNF 2008-05-08 14:31:59: Water flow switch not functioning Message-ID: From eenriquez at snf.stanford.edu Thu May 15 10:40:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 10:40:00 -0700 Subject: Shutdown AG4100 SNF 2008-05-08 14:31:59: Water flow switch not functioning Message-ID: Cleaned water flow switch From eenriquez at snf.stanford.edu Thu May 15 10:40:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 10:40:18 -0700 Subject: Shutdown AG4100 SNF 2008-05-08 07:39:41: Water flow Message-ID: Hooked up cooling water line to a recirculator. Flow rate is about 2 gpm. From eenriquez at snf.stanford.edu Thu May 15 10:40:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 10:40:35 -0700 Subject: Comment AG4100 SNF 2008-04-24 11:40:19: Needs process qual Message-ID: Noted From eenriquez at snf.stanford.edu Thu May 15 10:41:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 10:41:22 -0700 Subject: Comment AG4100 SNF 2008-05-05 08:11:30: Process Qual Completed Message-ID: Noted From eenriquez at snf.stanford.edu Thu May 15 10:41:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 10:41:47 -0700 Subject: Problem AG4100 SNF 2008-05-15 10:41:47: Needs to be qualed Message-ID: From masato at snf.stanford.edu Thu May 22 23:11:23 2008 From: masato at snf.stanford.edu (masato at snf.stanford.edu) Date: Thu, 22 May 2008 23:11:23 -0700 Subject: Problem AG4100 SNF 2008-05-22 23:11:22: Cooling water low Message-ID: Error message "cooling water low" appears. From shott at snf.stanford.edu Fri May 23 15:56:45 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 23 May 2008 15:56:45 -0700 Subject: Problem AG4100 SNF 2008-05-22 23:11:22: Cooling water low Message-ID: Cooling water was added to the chiller and Mike restarted the pump. The flow is OK, but the pressure is somewhat high. Also, the interlock to the chiller is unplugged which, I think, looks stranger Thanks, John From zhangy at snf.stanford.edu Thu May 29 15:12:43 2008 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Thu, 29 May 2008 15:12:43 -0700 Subject: Problem AG4100 SNF 2008-05-29 15:12:43: steady state temperature not stable Message-ID: I used the recipe RTA950 to anneal some wafers, however, during the second wafer annealing, the temperature dropped down at steady state (950C) , and the process was aborted. From emyers at snf.stanford.edu Fri May 30 14:50:58 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 30 May 2008 14:50:58 -0700 Subject: Comment AG4100 SNF 2008-05-30 14:50:57: Process Qual Data 4/28/09 Message-ID: 4/28/2008 Following Chamber Clean and Re-cal, 9Pt's Wfr1: 86.329 Avg, 2.6018% Std dev Wfr2: 86.45 Avg, 2.1596% Std dev Wfr3: 87.003 Avg, 2.3001% Std dev Wfr4: 87.609 Avg, 2.7229% Std dev Wfr5: 88.152 Avg, 2.6623% Std def From emyers at snf.stanford.edu Fri May 30 14:51:26 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 30 May 2008 14:51:26 -0700 Subject: Problem AG4100 SNF 2008-05-15 10:41:47: Needs to be qualed Message-ID: Completed 4/28/08, Reported on Coral 5/30/08 From jimkruger at snf.stanford.edu Fri May 30 18:41:32 2008 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 30 May 2008 18:41:32 -0700 Subject: Problem AG4100 SNF 2008-05-30 18:41:31: Fails after 10 or 15 sec of a 20 sec 1050 anneal Message-ID: Lower temp. recipes seem to work but on our 1050C recipe,after 10 or 15 sec., the lamps go out, the intensity spikes (but not heating) and the temp. falls to give an error.