From shott at snf.stanford.edu Sat Nov 1 11:26:34 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:26:34 -0700 Subject: Shutdown AG4100 SNF 2008-10-24 04:08:07: chiller leak - shutdown Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:26:43 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:26:43 -0700 Subject: Comment AG4100 SNF 2008-10-24 12:41:43: Update chiller leak Message-ID: No leaks for a week. I found the water flow to be too low (about 1.5 GPM) at the lower pressure. I raised the pressure to 75 PSI and get a flow of just lest than 2.0 GPM. John From shott at snf.stanford.edu Sat Nov 1 11:26:57 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:26:57 -0700 Subject: Comment AG4100 SNF 2007-08-24 13:26:00: Temp Calibration Qual Data Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:03 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:03 -0700 Subject: Problem AG4100 SNF 2008-01-24 09:26:32: No H2/N2 flow Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:08 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:08 -0700 Subject: Problem AG4100 SNF 2008-02-14 23:03:40: Lamp Failure Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:13 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:13 -0700 Subject: Problem AG4100 SNF 2008-06-09 16:21:25: Low Ammonia Gas Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:18 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:18 -0700 Subject: Problem AG4100 SNF 2008-07-31 00:33:57: overtemp alarms Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:23 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:23 -0700 Subject: Comment AG4100 SNF 2008-07-31 00:37:30: overtemp alarm Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:28 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:28 -0700 Subject: Problem AG4100 SNF 2008-08-26 16:31:10: intensity out of range Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:34 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:34 -0700 Subject: Comment AG4100 SNF 2008-08-29 11:22:22: Update Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:40 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:40 -0700 Subject: Comment AG4100 SNF 2008-08-29 17:41:41: Qualification Results -Pass Message-ID: From shott at snf.stanford.edu Sat Nov 1 11:27:48 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 1 Nov 2008 11:27:48 -0700 Subject: Comment AG4100 SNF 2008-08-29 18:17:37: Simulation Information Message-ID: From emyers at snf.stanford.edu Mon Nov 3 09:32:32 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 3 Nov 2008 09:32:32 -0800 Subject: Shutdown AG4100 SNF 2008-11-03 09:32:31: Significant Chamber Leak Message-ID: I confirmed with Elemer that the chamber leak has not been repaired. It's a large leak and will greatly impact any nitridation work. If you are wanting to run oxidation, we can talk and see if the system will meet your needs while it's waiting for repair. From emyers at snf.stanford.edu Tue Nov 4 13:55:13 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 4 Nov 2008 13:55:13 -0800 Subject: Problem AG4100 SNF 2008-11-04 13:55:12: Chamber Leak -Large Message-ID: There is still a large chamber leak. I am taking the system out of shutdown, because a lab member wants to use the system for anneal even with the chamber leak. From emyers at snf.stanford.edu Tue Nov 4 13:55:23 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 4 Nov 2008 13:55:23 -0800 Subject: Shutdown AG4100 SNF 2008-11-03 09:32:31: Significant Chamber Leak Message-ID: There is still a large chamber leak. I am taking the system out of shutdown, because a lab member wants to use the system for anneal even with the chamber leak. From maurice at snf.stanford.edu Wed Nov 5 10:34:22 2008 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 5 Nov 2008 10:34:22 -0800 Subject: Shutdown AG4100 SNF 2008-11-05 10:34:21: replacing chiller Message-ID: From emyers at snf.stanford.edu Wed Nov 5 14:42:20 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 5 Nov 2008 14:42:20 -0800 Subject: Shutdown AG4100 SNF 2008-11-05 10:34:21: replacing chiller Message-ID: Chiller replaced. From emyers at snf.stanford.edu Thu Nov 6 08:26:25 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 6 Nov 2008 08:26:25 -0800 Subject: Comment AG4100 SNF 2008-11-06 08:26:24: Not in good shape Message-ID: A couple of lab members used the system for anneals, which is why it was removed from shutdown. I looked at their wafers and they had lots of discoloration due to the chamber leak. Going in to the anneal they said it woud be OK to use. Once they ran their wafers they were not so positive. The system is not running well and I highly recommend you don't use the system. From eenriquez at snf.stanford.edu Fri Nov 7 14:26:46 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Nov 2008 14:26:46 -0800 Subject: Shutdown AG4100 SNF 2008-11-07 14:26:46: Update Message-ID: Chamber is very dirty and discolored. Mike installed a clean chamber. Need to perform a pyrometer calibration. From eenriquez at snf.stanford.edu Mon Nov 10 14:20:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Nov 2008 14:20:38 -0800 Subject: Comment AG4100 SNF 2008-11-10 14:20:32: Update Message-ID: Completed pyrometer calibration. Ed will be running a test. From emyers at snf.stanford.edu Mon Nov 10 14:48:50 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 14:48:50 -0800 Subject: Problem AG4100 SNF 2008-11-10 14:48:49: Door Leak Message-ID: Ran one wafer and it shows a door leak. I left the wafer in the receiver. From emyers at snf.stanford.edu Tue Nov 11 13:42:13 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 11 Nov 2008 13:42:13 -0800 Subject: Comment AG4100 SNF 2008-11-11 13:42:13: Yes Door Leak Message-ID: I rotated the wafers, but the discoloration remained at the door side. From eenriquez at snf.stanford.edu Wed Nov 12 06:53:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Nov 2008 06:53:30 -0800 Subject: Comment AG4100 SNF 2008-11-12 06:53:29: Field service Message-ID: Two field service engineers will be here today to work on both the 4100 and 4108. From eenriquez at snf.stanford.edu Wed Nov 12 16:48:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Nov 2008 16:48:44 -0800 Subject: Comment AG4100 SNF 2008-11-12 16:48:44: Update door leak / over temp Message-ID: Field service will rebuild the oven assembly at their shop. Will reinstall the oven on Friday and replace all the water cooling lines. Should be ready to test early next week. From emyers at snf.stanford.edu Fri Nov 14 15:04:19 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:04:19 -0800 Subject: Shutdown AG4100 SNF 2008-11-14 15:04:18: Chamber Repair Message-ID: The chamber is out for repair of clogged cooling lines. The estimated date of return is Wed. Nov. 19th. It will need a calibration and quals once it is replaced. From emyers at snf.stanford.edu Fri Nov 14 15:04:51 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:04:51 -0800 Subject: Problem AG4100 SNF 2008-09-23 16:09:23: door leak? Message-ID: We will verify the door seal once the chamber comes back from repair. From emyers at snf.stanford.edu Fri Nov 14 15:16:07 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:16:07 -0800 Subject: Comment AG4100 SNF 2008-10-08 10:29:06: Update door leak Message-ID: We will verify the door seal once the chamber comes back from repair. From emyers at snf.stanford.edu Fri Nov 14 15:16:18 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:16:18 -0800 Subject: Comment AG4100 SNF 2008-10-26 11:51:53: Door leak Message-ID: We will verify the door seal once the chamber comes back from repair. From emyers at snf.stanford.edu Fri Nov 14 15:16:26 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:16:26 -0800 Subject: Comment AG4100 SNF 2008-10-28 22:13:06: Any update? Message-ID: We will verify the door seal once the chamber comes back from repair. From emyers at snf.stanford.edu Fri Nov 14 15:16:33 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:16:33 -0800 Subject: Problem AG4100 SNF 2008-11-04 13:55:12: Chamber Leak -Large Message-ID: We will verify the door seal once the chamber comes back from repair. From emyers at snf.stanford.edu Fri Nov 14 15:17:24 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:17:24 -0800 Subject: Comment AG4100 SNF 2008-11-06 08:26:24: Not in good shape Message-ID: The chamber is out for repair of clogged cooling lines. From emyers at snf.stanford.edu Fri Nov 14 15:18:09 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:18:09 -0800 Subject: Shutdown AG4100 SNF 2008-11-07 14:26:46: Update Message-ID: Chamber is out for repair of clogged cooling lines. Temp cals and qualification will need to be done once it's returned. From emyers at snf.stanford.edu Fri Nov 14 15:18:51 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:18:51 -0800 Subject: Comment AG4100 SNF 2008-11-10 14:20:32: Update Message-ID: We will need to requalify the system once the chamber comes back from repair of clogged cooling lines. From emyers at snf.stanford.edu Fri Nov 14 15:19:01 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:19:01 -0800 Subject: Problem AG4100 SNF 2008-11-10 14:48:49: Door Leak Message-ID: We will verify the door seal once the chamber comes back from repair. From emyers at snf.stanford.edu Fri Nov 14 15:19:08 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:19:08 -0800 Subject: Comment AG4100 SNF 2008-11-11 13:42:13: Yes Door Leak Message-ID: We will verify the door seal once the chamber comes back from repair. From emyers at snf.stanford.edu Fri Nov 14 15:19:39 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:19:39 -0800 Subject: Comment AG4100 SNF 2008-11-12 06:53:29: Field service Message-ID: Field service took the chamber back to their facility for repair of clogged cooling lines. From emyers at snf.stanford.edu Fri Nov 14 15:20:04 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 14 Nov 2008 15:20:04 -0800 Subject: Comment AG4100 SNF 2008-11-12 16:48:44: Update door leak / over temp Message-ID: Current return date is Wed. Nov. 19th. From eenriquez at snf.stanford.edu Fri Nov 21 14:48:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 Nov 2008 14:48:57 -0800 Subject: Comment AG4100 SNF 2008-11-21 14:48:56: Update Message-ID: Replumbing the cooling water line. We are connecting it to facilties process cooling water (with a filter). Also replacing the tygon tubing used for the door cooling water. The work should be completed by Tuesday. From emyers at snf.stanford.edu Wed Nov 26 15:35:45 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 26 Nov 2008 15:35:45 -0800 Subject: Comment AG4100 SNF 2008-11-26 15:35:44: Nov. 26, 08 Update Message-ID: I spent a little time on the system today. We can not get the main power circuit breaker to latch and the system will not power up, so I could not proceed with the qualification. In additon, I found the gas supply has not been reattached to the chamber. John is looking for a replacement breaker, which is the next first step. From cbaxter at snf.stanford.edu Wed Nov 26 22:41:02 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 26 Nov 2008 22:41:02 -0800 Subject: Comment AG4100 SNF 2008-11-26 22:41:02: Power Message-ID: The system is power on and gas line re-connected. Still need to profile temp.