From eenriquez at snf.stanford.edu  Wed Oct  8 10:29:06 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 8 Oct 2008 10:29:06 -0700
Subject: Comment AG4100 SNF 2008-10-08 10:29:06: Update door leak
Message-ID: <mailman.190.1356280411.3183.ag4100-pcs@snf.stanford.edu>

Ran Ti test wafers.  Leak seems to be coming from the rear of the chamber (gas entry side).  Oring looked ok.  Doubled the process time and the "leak" got worse. 
Possibly contaminated N2 ????  Need to troubleshoot further but now out of test wafers.



From eenriquez at snf.stanford.edu  Thu Oct  9 11:16:05 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 9 Oct 2008 11:16:05 -0700
Subject: Shutdown AG4100 SNF 2008-10-09 11:16:04: Replacing the chiller
Message-ID: <mailman.191.1356280411.3183.ag4100-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Oct 10 10:32:23 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 10 Oct 2008 10:32:23 -0700
Subject: Shutdown AG4100 SNF 2008-10-09 11:16:04: Replacing the chiller
Message-ID: <mailman.192.1356280411.3183.ag4100-pcs@snf.stanford.edu>

Installed new recirculator.



From jprovine at snf.stanford.edu  Fri Oct 24 04:08:09 2008
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Fri, 24 Oct 2008 04:08:09 -0700
Subject: Shutdown AG4100 SNF 2008-10-24 04:08:07: chiller leak - shutdown
Message-ID: <mailman.193.1356280411.3183.ag4100-pcs@snf.stanford.edu>

10/24 early am:  large leak of water...stopped on its own, likely because empty of chiller water.  spill has been mopped up.  leak was spraying forcefully from back panel.



From eenriquez at snf.stanford.edu  Fri Oct 24 12:41:43 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 24 Oct 2008 12:41:43 -0700
Subject: Comment AG4100 SNF 2008-10-24 12:41:43: Update chiller leak
Message-ID: <mailman.194.1356280411.3183.ag4100-pcs@snf.stanford.edu>

Found one of the chamber water cooling lines had popped off.  Repaired the water line.  Also lowered the line pressure from 60 to 50 psi.  Noticed the water was very dirty.  Ray S. flushed out the chiller.
Turned chiller back on.  We will leave the system on shutdown over the weekend and continue to monitor for leaks.   Also need to check how the system will perform with the lower water pressure.



From nvgirish at snf.stanford.edu  Sun Oct 26 11:51:53 2008
From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu)
Date: Sun, 26 Oct 2008 11:51:53 -0700
Subject: Comment AG4100 SNF 2008-10-26 11:51:53: Door leak
Message-ID: <mailman.195.1356280411.3183.ag4100-pcs@snf.stanford.edu>

Is the door leak problem fixed?



From masaharu at snf.stanford.edu  Tue Oct 28 22:13:07 2008
From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu)
Date: Tue, 28 Oct 2008 22:13:07 -0700
Subject: Comment AG4100 SNF 2008-10-28 22:13:06: Any update?
Message-ID: <mailman.196.1356280411.3183.ag4100-pcs@snf.stanford.edu>

I appreciate any update.