From shott at snf.stanford.edu Sat Apr 4 08:18:31 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 4 Apr 2009 08:18:31 -0700 Subject: Comment AG4100 SNF 2009-04-04 08:18:31: Update ..... Message-ID: I replaced all 4 relays that are believed by AllWin to be possibly responsible for the temperature dropout conditions that we have seen intermittently over the years. The 3 relays on the RMS board that were replaced include: K1: W172DIP-4 K2: LM44D00 K3: LM44D00 I also replaced the RH2B-UAC24V relay on the main relay board based on their recommendation. I have not cleared the shutdown yet because I haven't had the chance to test these changes. I hope to be able to come back in this evening or tomorrow to exercise this tool. Thanks, John From shott at snf.stanford.edu Fri Apr 17 21:23:51 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 17 Apr 2009 21:23:51 -0700 Subject: Shutdown AG4100 SNF 2009-03-24 18:26:17: Intensity spikes .... Message-ID: We are still experiencing lamp drop out after about 20 seconds on the 1150 degree C 30 second QUAL recipe. I'm removing the shutdown, however, to allow folks that have either lower temperature or shorter time recipes to see if they can successfully run without lamp drop out. The email that I sent explaining that follows ... John SNF Lab Members: We continue to experience lamp drop outs for the standard 30 second 1150 degree C qualification runs .... the lamps turn off after about 20 or so seconds. This is after working with AllWin to identify some problematic relays that we have replaced ... but replacing those relays did not fix the problem so we continue to search for the root cause. While we are continuing to work on this problem, I have been asked whether either lower temperature or shorter time anneals will run successfully. The honest truth is that I don't know. I had the best of intentions of running a set of those experiments this week to determine that .... and never got around to that. So, for some of you who may be anxious to use the tool, I have a proposal where you can help me and, hopefully, get some useful work done. Here is what I propose .... I'm going to remove the shutdown .... with the caveat that careful testing needs to be performed for any recipe before you commit real wafers for this purpose. Particularly, for those of you who need either lower temperature or very short time anneals, it would help me to know if you experience lamp drop out. So, I've left a box of L-type test wafers in the load area of the AG4100. You may use any of those that you wish for testing. They will, of course, need to be cleaned first ... Also, if you keep track of your equipment time, I will make sure that you are not charged for the time you spend seeing if your recipe will run if you tell me what you learn .... either a certain recipe ran successfully or the lamps dropped out after so many seconds. I will treat that as community service time for any test wafers that you run. Note: I will also leave an empty box for the test wafers after they have been put through the machine so there is no chance of contaminating the wet benches. If you have any questions, let me know .... But PLEASE, PLEASE if you plan to use this tool, make sure that you run test wafers to make sure that you don't experience lamp drop out on your recipe!!! John From ajamo at snf.stanford.edu Wed Apr 22 00:36:24 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 22 Apr 2009 00:36:24 -0700 Subject: Shutdown AG4100 SNF 2009-04-22 00:36:23: wafer stuck inside Message-ID: I got the new test wafers John left, scribed them 1-25, piranah cleaned in wbnonmetal, and diff cleaned. I tried an anneal at 650 degrees 10 min but 100 seconds into the first test run the lamp shut off and the system errored out. I aborted the run, but couldn't get my wafer out. Test wafer 1 is stuck inside. I will leave the remainder of the test wafers by the AG100. From eenriquez at snf.stanford.edu Wed Apr 22 16:32:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Apr 2009 16:32:52 -0700 Subject: Shutdown AG4100 SNF 2009-04-22 00:36:23: wafer stuck inside Message-ID: Unloaded wafer From emyers at snf.stanford.edu Wed Apr 22 16:57:18 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 22 Apr 2009 16:57:18 -0700 Subject: Comment AG4100 SNF 2009-04-22 16:57:18: Temp Drop out update Message-ID: Today Elmer and I ran over 20 wafers using the Qual1150 recipe without a failure. Elmer moved to the connections to outermost thermal switchwhich stopped the top plate over heating we have been seeing. The TC gauge John installed stayed below 80C. The out of temperature error at steady state did not show up today. From eenriquez at snf.stanford.edu Wed Apr 22 16:59:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Apr 2009 16:59:47 -0700 Subject: Comment AG4100 SNF 2009-04-22 16:59:46: Update Message-ID: Swapped one of the thermal switches with an existing but unused one. Process 28 wafers (8 + 10 + 10) using the Qual 1150 recipe with no problems. Before the change, the system faulted for "Top plate over temp" when the external thermocouple (TC 1) reading ~ 36 C after about 30 sec @ 900 C. After the change, the system faulted after 240 sec @ 900 C when the external TC read about 90 C. Monitored the external TC (top plate temp) during the Qual 1150 ,10 wafer process run. The maximum temperature increased with each succesive wafer with the 10th wafer reaching 80 C. The max temperature of the last 5 wafers only increased by < 1 C. From eenriquez at snf.stanford.edu Thu Apr 23 08:45:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Apr 2009 08:45:39 -0700 Subject: Comment AG4100 SNF 2009-04-23 08:45:38: Max run time data Message-ID: Ran a test where I manually set the lamp intensity to obtain a temperature while monitoring the top plate temperature. The purpose of this test is to determine how long you could run at a particular temperature before the top plate over temp switch trips (89C - 90C) @ 650 C 150 sec - 52C 300 sec - 66C 450 sec - 73C 600 sec - 76C 750 sec - 79C @ 750 C 150 sec - 65C 300 sec - 82C (430) sec - 89C Lamps shut-off at 430 sec From skoh at snf.stanford.edu Thu Apr 23 17:02:44 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Thu, 23 Apr 2009 17:02:44 -0700 Subject: Comment AG4100 SNF 2009-04-23 17:02:43: No problems today Message-ID: Ran several wafers (2sec anneal at ~1190C) with no overtemp or temp drop out problems. Thanks for fixing the problems.