Shutdown AG4100 SNF 2009-04-22 00:36:23: wafer stuck inside

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Wed Apr 22 00:36:24 PDT 2009


I got the new test wafers John left, scribed them 1-25, piranah cleaned in wbnonmetal, and diff cleaned.   I tried an anneal at 650 degrees 10 min but 100 seconds into the first test run the lamp shut off and the system errored out.  I aborted the run, but couldn't get my wafer out.   Test wafer 1 is stuck inside.  I will leave the remainder of the test wafers by the AG100.  




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