Comment AG4100 SNF 2009-04-22 16:57:18: Temp Drop out update

emyers at snf.stanford.edu emyers at snf.stanford.edu
Wed Apr 22 16:57:18 PDT 2009


Today Elmer and I ran over 20 wafers using the Qual1150 recipe without a failure.  Elmer moved to the connections to outermost thermal switchwhich stopped the top plate over heating we have been seeing.  The TC gauge John installed stayed below 80C.  The out of temperature error at steady state did not show up today.




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