From eenriquez at snf.stanford.edu Wed Feb 4 11:25:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Feb 2009 11:25:40 -0800 Subject: Shutdown AG4100 SNF 2009-01-25 16:10:16: Did not pass Qual Message-ID: Installed a water booster pump to increase the cooling water flow rate from 1 gpm to 1.8 gpm. Ran in manual mode for 6.5 minutes @ 1025 C with no problems. From eenriquez at snf.stanford.edu Wed Feb 4 11:25:56 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Feb 2009 11:25:56 -0800 Subject: Comment AG4100 SNF 2009-01-23 07:39:20: Field Service 1/26/09 Message-ID: Archived From eenriquez at snf.stanford.edu Wed Feb 4 11:29:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Feb 2009 11:29:10 -0800 Subject: Problem AG4100 SNF 2009-02-04 11:29:10: Needs qual Message-ID: From skoh at snf.stanford.edu Tue Feb 10 19:44:59 2009 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 10 Feb 2009 19:44:59 -0800 Subject: Comment AG4100 SNF 2009-02-10 19:44:59: results of Qual1150 Message-ID: Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. Recipe data in skoh-Feb2009. wafer 1: Avg 103 SD 4.7 wafer 2: Avg 105 SD 5.5 wafer 3: Avg 105 SD 4.4 wafer 4: Avg 105 SD 3.5 wafer 5: Avg 109 SD 4.9 From shott at snf.stanford.edu Wed Feb 11 06:57:39 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 11 Feb 2009 06:57:39 -0800 Subject: Problem AG4100 SNF 2009-02-04 11:29:10: Needs qual Message-ID: Serene Koh ran the following qual and reported the results in a comment .... thanks Serene. Based on these results, this tool is going green. Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. Recipe data in skoh-Feb2009. wafer 1: Avg 103 SD 4.7 wafer 2: Avg 105 SD 5.5 wafer 3: Avg 105 SD 4.4 wafer 4: Avg 105 SD 3.5 wafer 5: Avg 109 SD 4.9 From eenriquez at snf.stanford.edu Wed Feb 11 07:49:05 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Feb 2009 07:49:05 -0800 Subject: Comment AG4100 SNF 2008-12-04 13:37:43: Results of QUAL1150 recipe ... Message-ID: Archived