Comment AG4100 SNF 2009-02-10 19:44:59: results of Qual1150

skoh at snf.stanford.edu skoh at snf.stanford.edu
Tue Feb 10 19:44:59 PST 2009


Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. Recipe data in skoh-Feb2009.
wafer 1: Avg 103 SD 4.7
wafer 2: Avg 105 SD 5.5
wafer 3: Avg 105 SD 4.4
wafer 4: Avg 105 SD 3.5
wafer 5: Avg 109 SD 4.9




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