Comment AG4100 SNF 2009-02-10 19:44:59: results of Qual1150

[skoh at snf.stanford.edu]

Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. Recipe data in skoh-Feb2009.
wafer 1: Avg 103 SD 4.7
wafer 2: Avg 105 SD 5.5
wafer 3: Avg 105 SD 4.4
wafer 4: Avg 105 SD 3.5
wafer 5: Avg 109 SD 4.9