Problem AG4100 SNF 2009-02-04 11:29:10: Needs qual

shott at snf.stanford.edu shott at snf.stanford.edu
Wed Feb 11 06:57:39 PST 2009


Serene Koh ran the following qual and reported the results in a comment .... thanks Serene.  Based on these results, this tool is going green.
Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. Recipe data in skoh-Feb2009.
wafer 1: Avg 103 SD 4.7
wafer 2: Avg 105 SD 5.5
wafer 3: Avg 105 SD 4.4
wafer 4: Avg 105 SD 3.5
wafer 5: Avg 109 SD 4.9




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