From shott at snf.stanford.edu Tue Jan 6 07:52:23 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 6 Jan 2009 07:52:23 -0800 Subject: Shutdown AG4100 SNF 2008-12-18 07:55:07: Facilities electrical work Message-ID: Electrical work completed .... From emyers at snf.stanford.edu Wed Jan 7 12:15:38 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 7 Jan 2009 12:15:38 -0800 Subject: Shutdown AG4100 SNF 2009-01-07 12:15:38: Failed Qual Message-ID: Got the top plate over temp error on wafer 2. During the retry, I saw the pyrometer temp drop and the intensity read full scale. I did not see the chamber at this time, but in the past the lamps actually go out and not to full power. From emyers at snf.stanford.edu Fri Jan 23 07:39:20 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 23 Jan 2009 07:39:20 -0800 Subject: Comment AG4100 SNF 2009-01-23 07:39:20: Field Service 1/26/09 Message-ID: AlWin will be in on Monday 1/26 to address our over temperature fault problems. From shott at snf.stanford.edu Sun Jan 25 12:50:57 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 25 Jan 2009 12:50:57 -0800 Subject: Shutdown AG4100 SNF 2009-01-07 12:15:38: Failed Qual Message-ID: Cesar and I replumbed the cooling lines so that the 4100 is no longer downstream of the 4108. It now has separated on/off valves (taken from the old implanter350 cooling lines, it's own filter, and it's own pressure gauges. Supply pressure is about 62-64 PSI and return pressure is about 40 PSI. Flow is about 1.2 GPM. John From emyers at snf.stanford.edu Sun Jan 25 16:10:16 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 25 Jan 2009 16:10:16 -0800 Subject: Shutdown AG4100 SNF 2009-01-25 16:10:16: Did not pass Qual Message-ID: Per the Quality Circle the tool must be shut down if it fails the qualification test. We will continue to work on the tool for the next couple of days and hopefully can get it qualified.