Shutdown AG4100 SNF 2009-01-07 12:15:38: Failed Qual

emyers at snf.stanford.edu emyers at snf.stanford.edu
Wed Jan 7 12:15:38 PST 2009


Got the top plate over temp error on wafer 2.  During the retry, I saw the pyrometer temp drop and the intensity read full scale.  I did not see the chamber at this time, but in the past the lamps actually go out and not to full power.




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