Problem AG4100 SNF 2009-03-04 01:05:10: over temp top plate

jackson at snf.stanford.edu jackson at snf.stanford.edu
Wed Mar 4 01:05:11 PST 2009

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running 1050 / 30 seconds .  program has proven to work before

Previous message: Problem AG4100 SNF 2009-03-04 01:03:31: overtemp top plate error on 2nd wafer
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