Comment AG4100 SNF 2009-03-05 08:23:38: Top Plate
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Thu Mar 5 08:23:38 PST 2009
This happened to me when I last ran the qualification. It failed at the end of the second wafer. The thermal switches auto-reset once they are cooled. When we came back to look at the system, it did not fail while running a couple of cassettes of wafers. This has been a nagging problem and we had rebuilt and increased the water cooling. No clear pathway from here.
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