Shutdown AG4100 SNF 2009-03-24 18:26:17: Intensity spikes ....

shott at snf.stanford.edu shott at snf.stanford.edu
Tue Mar 24 18:26:17 PDT 2009


During testing of the new top and bottom thermocouple data logging, I found that every wafer developed the lamp out and/or intensity spike about 20 seconds into the oxidation of QUAL 1150.
I feel that I should shut this down until we can investigate further.
THanks,
John




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