Problem AG4100 SNF 2009-05-18 09:39:05: RBR Error

rhenn at snf.stanford.edu rhenn at snf.stanford.edu
Mon May 18 09:39:06 PDT 2009


Robot did not detect wafers in the first 2 slots. Then threw an rbr error. Also states that robot communication has a problem. Robot arm currently extended into the send casette.




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