From ajamo at snf.stanford.edu Sat Nov 28 02:24:55 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 28 Nov 2009 02:24:55 -0800 Subject: Problem AG4100 SNF 2009-11-28 02:24:55: Forming Gas Message-ID: Trying to run a recipe with Forming gas. When I select this gas, it does not register on the gas meters on the run-time screen while the recipe is running- looks like the forming gas is not flowing. When I select any of the other available gasses they register on the gas meters. Please advise? From shott at stanford.edu Sat Nov 28 08:20:56 2009 From: shott at stanford.edu (John Shott) Date: Sat, 28 Nov 2009 08:20:56 -0800 Subject: Problem AG4100 SNF 2009-11-28 02:24:55: Forming Gas In-Reply-To: <20091128102455.83259C186@smtp.stanford.edu> References: <20091128102455.83259C186@smtp.stanford.edu> Message-ID: <4B114DE8.1040105@stanford.edu> Aleta: By looking at the gas panel, I can see that the Argon line and the forming gas line share a mass flow controller and that the quarter turn valve that would allow forming gas to flow is held in the closed position by a tywrap. In other words, the system is only configured so that one of those gases can flow at any one time .... and it is currently set up for argon rather than forming gas. In fact, my guess is that it has been in that configuration for some time. This leads me to believe that there is likely some machine reconfiguration that is required to switch from argon to forming gas over and above closing the argon quarter-turn valve and opening the forming gas quarter turn valve. As I really don't know the details of this process, I believe that the best thing to do is to wait until Monday when folks more knowledgeable than I will be around. Thanks, John