Problem AG4100 SNF 2009-07-13 11:40:38: NH3 Gas Flow Not working
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Sep 30 17:32:00 PDT 2009
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Comment AG4100 SNF 2009-07-14 12:22:18: Update NH3 flow
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Problem AG4100 SNF 2009-09-30 17:32:24: Need NH3 cylinder change
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Repaired and recalibrated the NH3 MFC.
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Comment AG4100 SNF 2009-07-14 12:22:18: Update NH3 flow
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Problem AG4100 SNF 2009-09-30 17:32:24: Need NH3 cylinder change
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