From ryhuang at snf.stanford.edu Mon Aug 9 18:48:47 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Mon, 9 Aug 2010 18:48:47 -0700 Subject: Problem AG4100 SNF 2010-08-09 18:48:46: N2O flow fluctuating... Message-ID: Ran 5 wafers with 5slm N2O flow. During 1st and 3rd wafer runs, N2O flow dropped dramatically and then recovered. N2O bottle running out? During the 3rd wafer run, I opened the N2O valve about 1/4 turn. Log files are in the quswami directory, lot id is qs61500n2o, data files are pwrqs450.00x. Also, I think the TC monitor needs a new battery. Robert From cbaxter at snf.stanford.edu Wed Aug 11 09:36:51 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Aug 2010 09:36:51 -0700 Subject: Problem AG4100 SNF 2010-08-09 18:48:46: N2O flow fluctuating... Message-ID: Flowed N20 manually for 10mins and flow is stable. From ryhuang at snf.stanford.edu Tue Aug 17 13:40:13 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Tue, 17 Aug 2010 13:40:13 -0700 Subject: Problem AG4100 SNF 2010-08-17 13:40:13: N2O flow still unstable Message-ID: Ran several wafers yesterday through 10min anneals with 5slm of N2O flow. Verified that N2O valve was completely open, but flow fluctuated and dropped to nearly zero on several wafers. Robert From emyers at snf.stanford.edu Tue Aug 17 14:34:22 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 17 Aug 2010 14:34:22 -0700 Subject: Comment AG4100 SNF 2010-08-17 14:34:22: N20 Flow Message-ID: Ray and I looked at the gas panel for the N2O. It was acting funny. If we increased the low pressure side, the high pressure dropped to 0 psi then slowly recovered. We also cycled the manual valves on the high pressure side and we saw a jump in the high side pressure up to the head pressure. Right now the line pressure on the low side has been increased from 40 psi to about 70psi. We need to bleed off some of the pressure and test the high pressure side to make sure it's holding the head pressure. From emyers at snf.stanford.edu Thu Aug 19 11:39:43 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 19 Aug 2010 11:39:43 -0700 Subject: Problem AG4100 SNF 2010-08-17 13:40:13: N2O flow still unstable Message-ID: Range 5slpm for 10 min with high line pressure. Reset the line pressure to 30psi and ran for 20 min. I did not see any sag in flow or line pressure. From emyers at snf.stanford.edu Thu Aug 19 11:40:06 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 19 Aug 2010 11:40:06 -0700 Subject: Comment AG4100 SNF 2010-08-17 14:34:22: N20 Flow Message-ID: Range 5slpm for 10 min with high line pressure. Reset the line pressure to 30psi and ran for 20 min. I did not see any sag in flow or line pressure. From ryhuang at snf.stanford.edu Mon Aug 23 15:55:32 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Mon, 23 Aug 2010 15:55:32 -0700 Subject: Problem AG4100 SNF 2010-08-23 15:55:32: Still having N2O flow problems... Message-ID: 1st 3 test wafers ran fine - 10min each with 5slm N2O flow, gauge reading was 29psi throughout. However, for the next 3 test wafers, the last wafer (6th wafer I ran) N2O flow went to zero after about 3 minutes with gauge reading dropping to 3psi. Robert From emyers at snf.stanford.edu Tue Aug 24 08:23:25 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 24 Aug 2010 08:23:25 -0700 Subject: Problem AG4100 SNF 2010-08-24 08:23:25: N2O Flow Message-ID: A valve in the gas box is failing. Cycling the high pressure valve restores the line pressure. Unfortunately it does not stay on. The gas panel needs to be rebuilt and the valve replaced. From ryhuang at snf.stanford.edu Fri Aug 27 17:54:29 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Fri, 27 Aug 2010 17:54:29 -0700 Subject: Shutdown AG4100 SNF 2010-08-27 17:54:28: robot error and wafer stuck in chamber... Message-ID: In middle of cassette run, robot got stuck inside chamber with a wafer. Extend/retract axis error - alarm code 77 showed on the screen. I reset the s/w per Ed's instructions but the error persisted. There is a wafer stuck inside the chamber as well. Robert From ryhuang at snf.stanford.edu Fri Aug 27 17:59:56 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Fri, 27 Aug 2010 17:59:56 -0700 Subject: Comment AG4100 SNF 2010-08-27 17:59:56: wafer removed Message-ID: Maurice was able to remove the wafer with the vacuum wand. From emyers at snf.stanford.edu Mon Aug 30 08:58:32 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 30 Aug 2010 08:58:32 -0700 Subject: Shutdown AG4100 SNF 2010-08-30 08:58:32: Broken wafer tray Message-ID: Need to replace the wafer tray From eenriquez at snf.stanford.edu Mon Aug 30 09:52:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2010 09:52:25 -0700 Subject: Shutdown AG4100 SNF 2010-08-30 08:58:32: Broken wafer tray Message-ID: Vacuumed the chamber and replaced the broken tray. Cycled a wafer in and out of the chamber several times with no problems. From eenriquez at snf.stanford.edu Mon Aug 30 09:53:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2010 09:53:30 -0700 Subject: Shutdown AG4100 SNF 2010-08-27 17:54:28: robot error and wafer stuck in chamber... Message-ID: Cycled a wafer in and out the chamber several times with no problems after we replaced the wafer tray. From ajamo at snf.stanford.edu Tue Aug 31 22:44:30 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Tue, 31 Aug 2010 22:44:30 -0700 Subject: Problem AG4100 SNF 2010-08-31 22:44:27: wafer handling Message-ID: ran 5 test wafers and 12 real wafers last night & robot had intermittant problems picking up and placing wafers in the send/recieve cassettes. Had to rescue a few wafers & reset the robot 4 times