Problem AG4100 SNF 2010-08-09 18:48:46: N2O flow fluctuating...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Mon Aug 9 18:48:47 PDT 2010


Ran 5 wafers with 5slm N2O flow.  During 1st and 3rd wafer runs, N2O flow dropped dramatically and then recovered.  N2O bottle running out?  During the 3rd wafer run, I opened the N2O valve about 1/4 turn.  Log files are in the quswami directory, lot id is qs61500n2o, data files are pwrqs450.00x.  Also, I think the TC monitor needs a new battery.
Robert




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