Problem AG4100 SNF 2010-08-17 13:40:13: N2O flow still unstable

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Tue Aug 17 13:40:13 PDT 2010


Ran several wafers yesterday through 10min anneals with 5slm of N2O flow.  Verified that N2O valve was completely open, but flow fluctuated and dropped to nearly zero on several wafers.
Robert




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