Problem AG4100 SNF 2010-08-23 15:55:32: Still having N2O flow problems...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Mon Aug 23 15:55:32 PDT 2010


1st 3 test wafers ran fine - 10min each with 5slm N2O flow, gauge reading was 29psi throughout.  However, for the next 3 test wafers, the last wafer (6th wafer I ran) N2O flow went to zero after about 3 minutes with gauge reading dropping to 3psi.
Robert




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