Shutdown AG4100 SNF 2010-08-27 17:54:28: robot error and wafer stuck in chamber...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Fri Aug 27 17:54:29 PDT 2010


In middle of cassette run, robot got stuck inside chamber with a wafer.  Extend/retract axis error - alarm code 77 showed on the screen.  I reset the s/w per Ed's instructions but the error persisted.  There is a wafer stuck inside the chamber as well.
Robert




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