Shutdown AG4100 SNF 2010-08-30 08:58:32: Broken wafer tray

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 30 09:52:25 PDT 2010


Vacuumed the chamber and replaced the broken tray.  Cycled a wafer in and out of the chamber several times with no problems.




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