Shutdown AG4100 SNF 2010-08-27 17:54:28: robot error and wafer stuck in chamber...

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 30 09:53:30 PDT 2010


Cycled a wafer in and out the chamber several times with no problems after we replaced the wafer tray.




More information about the AG4100-pcs mailing list