Problem AG4100 SNF 2010-08-31 22:44:27: wafer handling

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Tue Aug 31 22:44:30 PDT 2010


ran 5 test wafers and 12 real wafers last night & robot had intermittant problems picking up and placing wafers in the send/recieve cassettes.  Had to rescue a few wafers & reset the robot 4 times




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