From emyers at snf.stanford.edu Wed Feb 3 15:51:35 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 3 Feb 2010 15:51:35 -0800 Subject: Problem AG4100 SNF 2010-01-31 11:40:36: Robot seems OK Message-ID: ran multiple lots without a problem. From mdickey at snf.stanford.edu Mon Feb 8 09:28:54 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 8 Feb 2010 09:28:54 -0800 Subject: Shutdown AG4100 SNF 2010-02-08 09:28:53: chamber clea Message-ID: Cleaning chamber and tray From mdickey at snf.stanford.edu Mon Feb 8 14:10:51 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 8 Feb 2010 14:10:51 -0800 Subject: Comment AG4100 SNF 2010-02-08 14:10:50: test Message-ID: Chamber cleaned and reassembled. Needs test From emyers at snf.stanford.edu Mon Feb 8 15:18:43 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 8 Feb 2010 15:18:43 -0800 Subject: Shutdown AG4100 SNF 2010-02-08 09:28:53: chamber clea Message-ID: Should be for AG4108 not this system From emyers at snf.stanford.edu Mon Feb 8 15:18:59 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 8 Feb 2010 15:18:59 -0800 Subject: Comment AG4100 SNF 2010-02-08 14:10:50: test Message-ID: Should be for AG4108 not this system. From emyers at snf.stanford.edu Wed Feb 10 13:17:55 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 10 Feb 2010 13:17:55 -0800 Subject: Shutdown AG4100 SNF 2010-02-10 13:17:54: Lost Robot Communications Message-ID: Restarting the computer did not work. Tried to restart tool, but it will not turn on, just like last week. Last week, when the tool did turn on I was able to get the robot running. I will keep trying. From emyers at snf.stanford.edu Wed Feb 10 13:45:26 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 10 Feb 2010 13:45:26 -0800 Subject: Shutdown AG4100 SNF 2010-02-10 13:17:54: Lost Robot Communications Message-ID: System restarted and was able to home the robot. From emyers at snf.stanford.edu Wed Feb 10 16:42:44 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 10 Feb 2010 16:42:44 -0800 Subject: Comment AG4100 SNF 2010-02-10 16:42:44: Qual Feb. 10, 2010 Message-ID: Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. wafer 1: Avg 130 SD 7.9 wafer 2: Avg 130 SD 8.9 wafer 3: Avg 130 SD 8.9 wafer 4: Avg 131 SD 8.7 wafer 5: Avg 133 SD 8.7 Typically I would expect values closer to 120 Ang. System running a little hot. From narii at snf.stanford.edu Sat Feb 20 21:47:08 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sat, 20 Feb 2010 21:47:08 -0800 Subject: Problem AG4100 SNF 2010-02-20 21:47:08: No Autofile validated Message-ID: Even if I did validation before leaving auto setup, when I push auto run no Autofile validated message is shown. No problem with running in manual mode though. From emyers at snf.stanford.edu Wed Feb 24 15:37:18 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 24 Feb 2010 15:37:18 -0800 Subject: Problem AG4100 SNF 2010-02-20 21:47:08: No Autofile validated Message-ID: Sounds like the Autofile was not saved after the validation. If the file is not saved, all the changes are recognized. From ajamo at snf.stanford.edu Sat Feb 27 18:29:05 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 27 Feb 2010 18:29:05 -0800 Subject: Problem AG4100 SNF 2010-02-27 18:29:04: Software crash? Message-ID: I was setting up to run my recipe and the software has hung up. Not sure how to reset the program etc.. From ajamo at snf.stanford.edu Sat Feb 27 22:59:10 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 27 Feb 2010 22:59:10 -0800 Subject: Comment AG4100 SNF 2010-02-27 22:59:10: Rebooted - Okay Message-ID: Called Ed, cntrl +alt + delete & everything rebooted fine.