Comment AG4100 SNF 2010-02-10 16:42:44: Qual Feb. 10, 2010

emyers at snf.stanford.edu emyers at snf.stanford.edu
Wed Feb 10 16:42:44 PST 2010


Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 130 SD 7.9
wafer 2: Avg 130 SD 8.9
wafer 3: Avg 130 SD 8.9
wafer 4: Avg 131 SD 8.7
wafer 5: Avg 133 SD 8.7
Typically I would expect values closer to 120 Ang.  System running a little hot.




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