From ajamo at snf.stanford.edu Mon Jan 11 22:03:02 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Mon, 11 Jan 2010 22:03:02 -0800 Subject: Problem AG4100 SNF 2010-01-11 22:03:01: N2O2 not flowing Message-ID: I ran my recipe using N2O2 and it flowed for ~60 sec on a test wafer and then stopped. Tried a few more test wafers and there was no N2O2 flow at all. Black needle on N2O2 gage is around zero. Please check. Tried recipe with N2 and NH3 and those gasses are working fine. From eenriquez at snf.stanford.edu Thu Jan 21 13:51:46 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Jan 2010 13:51:46 -0800 Subject: Problem AG4100 SNF 2010-01-11 22:03:01: N2O2 not flowing Message-ID: Installed new N2O cylinder. Checked the flow at the system From eenriquez at snf.stanford.edu Thu Jan 21 13:51:56 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 21 Jan 2010 13:51:56 -0800 Subject: Comment AG4100 SNF 2009-12-11 11:25:02: N2O Message-ID: Installed new N2O cylinder. Checked the flow at the system From ajamo at snf.stanford.edu Thu Jan 21 22:01:17 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 21 Jan 2010 22:01:17 -0800 Subject: Problem AG4100 SNF 2010-01-21 22:01:16: robot extend/retract error Message-ID: robot not moving, tried different recipes & wafer transport screen, robot will not move at all to load the wafers - help! From eenriquez at snf.stanford.edu Fri Jan 22 09:30:00 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 Jan 2010 09:30:00 -0800 Subject: Problem AG4100 SNF 2010-01-21 22:01:16: robot extend/retract error Message-ID: Reset the robot. Ran 2 wafers using the PWRQS400 recipe in auto mode with no problems. From emyers at snf.stanford.edu Fri Jan 29 15:21:08 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 29 Jan 2010 15:21:08 -0800 Subject: Shutdown AG4100 SNF 2010-01-29 15:21:07: No System Power Message-ID: I did a number of computer resets and could not get it to communicate with the robot. I powered down the system with the intention of doing a complete start-up. Now I can't power up the system. The ON button is working, but the system is not latching and drops out when I release the ON button. From emyers at snf.stanford.edu Sun Jan 31 11:39:57 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 31 Jan 2010 11:39:57 -0800 Subject: Shutdown AG4100 SNF 2010-01-29 15:21:07: No System Power Message-ID: System powered up today and I was able to get the robot to home. I did not have wafers to run, but I was able to command the robot movement. From emyers at snf.stanford.edu Sun Jan 31 11:40:37 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 31 Jan 2010 11:40:37 -0800 Subject: Problem AG4100 SNF 2010-01-31 11:40:36: Robot seems OK Message-ID: System powered up today and I was able to get the robot to home. I did not have wafers to run, but I was able to command the robot movement. I will leave under a problem until we run some real wafers