Problem AG4100 SNF 2010-01-11 22:03:01: N2O2 not flowing

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Mon Jan 11 22:03:02 PST 2010


I ran my recipe using N2O2 and it flowed for ~60 sec on a test wafer and then stopped.  Tried a few more test wafers and there was no N2O2 flow at all.  Black needle on N2O2 gage is around zero.  Please check.  Tried recipe with N2 and NH3 and those gasses are working fine.  




More information about the AG4100-pcs mailing list