Problem AG4100 SNF 2010-01-21 22:01:16: robot extend/retract error

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jan 22 09:30:00 PST 2010


Reset the robot.  Ran 2 wafers using the PWRQS400 recipe in auto mode with no problems.




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