From emyers at snf.stanford.edu Thu Jun 10 13:54:49 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 10 Jun 2010 13:54:49 -0700 Subject: Problem AG4100 SNF 2010-05-26 13:07:20: last wafer peeled... Message-ID: Comment from the lab member whose wafer peeled. I ran 3 test wafers and did not see any visible defects/particles on them as they came out of the chamber. I then ran 12 of my product wafers, and they also looked OK. Robert From emyers at snf.stanford.edu Thu Jun 10 13:54:58 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 10 Jun 2010 13:54:58 -0700 Subject: Comment AG4100 SNF 2010-05-26 17:43:35: peeling wafer update - ran add'l wafers OK... Message-ID: Archived From emyers at snf.stanford.edu Thu Jun 10 13:56:53 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 10 Jun 2010 13:56:53 -0700 Subject: Comment AG4100 SNF 2010-05-27 10:30:18: fludh Message-ID: Archived