Comment AG4100 SNF 2010-05-14 15:33:37: Qual. May 14, 2010

emyers at snf.stanford.edu emyers at snf.stanford.edu
Fri May 14 15:33:37 PDT 2010


Ran 5 wafers in automatic. Measured on Woollam using RTO Qual program. Results in Angstroms. 
wafer 1: Avg 132 SD 7.7
wafer 2: Avg 132 SD 7.7
wafer 3: Avg 134 SD 8.1
System Over Temp'd on wafer #4.
wafer 4: Not Ran
wafer 5: Not Ran
February Qual thickness was 130 Ang.  If we could have ran 5 wafers I would have considered the system to be qualified.




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